Whispering gallery mode (WGM) microcavities provide increasing opportunities for precision measurement due to their ultrahigh sensitivity, compact size, and fast response. However, the conventional WGM sensors rely on monitoring the changes of a single mode, and the abundant sensing information in WGM transmission spectra has not been fully utilized. Here, empowered by machine learning (ML), we propose and demonstrate an ergodic spectra sensing method in an optofluidic microcavity for high-precision pressure measurement. The developed ML method realizes the analysis of the full features of optical spectra. The prediction accuracy of 99.97% is obtained with the average error as low as 0.32 kPa in the pressure range of 100 kPa via the training and testing stages. We further achieve the real-time readout of arbitrary unknown pressure within the range of measurement, and a prediction accuracy of 99.51% is obtained. Moreover, we demonstrate that the ergodic spectra sensing accuracy is ∼11.5% higher than that of simply extracting resonating modes’ wavelength. With the high sensitivity and prediction accuracy, this work opens up a new avenue for integrated intelligent optical sensing.

Integrated circuit (IC) industry has fully considered the fact that the Moore’s Law is slowing down or ending. Alternative solutions are highly and urgently desired to break the physical size limits in the More-than-Moore era. Integrated silicon photonics technology exhibits distinguished potential to achieve faster operation speed, less power dissipation, and lower cost in IC industry, because their COMS compatibility, fast response, and high monolithic integration capability. Particularly, compared with other on-chip resonators (e.g. microrings, 2D photonic crystal cavities) silicon-on-insulator (SOI)-based photonic crystal nanobeam cavity (PCNC) has emerged as a promising platform for on-chip integration, due to their attractive properties of ultra-high Q/V, ultra-compact footprints and convenient integration with silicon bus-waveguides. In this paper, we present a comprehensive review on recent progress of on-chip PCNC devices for lasing, modulation, switching/filting and label-free sensing, etc.

The ability to sense dynamic biochemical reactions and material processes is particularly crucial for a wide range of applications, such as early-stage disease diagnosis and biomedicine development. Optical microcavities-based label-free biosensors are renowned for ultrahigh sensitivities, and the detection limit has reached a single nanoparticle/molecule level. In particular, a microbubble resonator combined with an ultrahigh quality factor (Q) and inherent microfluidic channel is an intriguing platform for optical biosensing in an aqueous environment. In this work, an ultrahigh Q microbubble resonator-based sensor is used to characterize dynamic phase transition of a thermosensitive hydrogel. Experimentally, by monitoring resonance wavelength shift and linewidth broadening, we (for the first time to our knowledge) reveal that the refractive index is increased and light scattering is enhanced simultaneously during the hydrogel hydrophobic transition process. The platform demonstrated here paves the way to microfluidical biochemical dynamic detection and can be further adapted to investigating single-molecule kinetics.

All-dielectric metamaterials have emerged as a promising platform for low-loss and highly efficient terahertz devices. However, existing fabrication methods have difficulty in achieving a good balance between precision and cost. Here, inspired by the nano-template-assisted self-assembly method, we develop a micro-template-assisted self-assembly (MTAS) method to prepare large-scale, high-precision, and flexible ceramic microsphere all-dielectric metamaterials with an area exceeding 900 cm×900 cm. Free from organic solvents, vacuum, and complex equipment, the MTAS method ensures low-cost and environmentally friendly fabrication. The ceramic microsphere resonators can be readily assembled into nearly arbitrary arrangements and complex aggregates, such as dimers, trimers, quadrumers, and chains. Finally, using the heat-shrinkable substrate and dipole coupling effect, a broadband reflector with a bandwidth of 0.15 THz and a reflection of up to 95% is demonstrated. This work provides a versatile and powerful platform for terahertz all-dielectric metamaterials, with potential to be applied in a wide variety of high-efficiency terahertz devices.

Optical trapping techniques are of great interest since they have the advantage of enabling the direct handling of nanoparticles. Among various optical trapping systems, photonic crystal nanobeam cavities have attracted great attention for integrated on-chip trapping and manipulation. However, optical trapping with high efficiency and low input power is still a big challenge in nanobeam cavities because most of the light energy is confined within the solid dielectric region. To this end, by incorporating a nanoslotted structure into an ultracompact one-dimensional photonic crystal nanobeam cavity structure, we design a promising on-chip device with ultralarge trapping potential depth to enhance the optical trapping characteristic of the cavity. In this work, we first provide a systematic analysis of the optical trapping force for an airborne polystyrene (PS) nanoparticle trapped in a cavity model. Then, to validate the theoretical analysis, the numerical simulation proof is demonstrated in detail by using the three-dimensional finite element method. For trapping a PS nanoparticle of 10 nm radius within the air-slot, a maximum trapping force as high as 8.28 nN/mW and a depth of trapping potential as large as 1.15×105 kBT mW 1 are obtained, where kB is the Boltzmann constant and T is the system temperature. We estimate a lateral trapping stiffness of 167.17 pN·nm 1· mW 1 for a 10 nm radius PS nanoparticle along the cavity x-axis, more than two orders of magnitude higher than previously demonstrated on-chip, near field traps. Moreover, the threshold power for stable trapping as low as 0.087 μW is achieved. In addition, trapping of a single 25 nm radius PS nanoparticle causes a 0.6 nm redshift in peak wavelength. Thus, the proposed cavity device can be used to detect single nanoparticle trapping by monitoring the resonant peak wavelength shift. We believe that the architecture with features of an ultracompact footprint, high integrability with optical waveguides/circuits, and efficient trapping demonstrated here will provide a promising candidate for developing a lab-on-a-chip device with versatile functionalities.